European Symposium on Computer Aided Process Engineering - ESCAPE 24 - June 15-18, 2014 - Budapest, Hungary
 
 
Wednesday, 18 October 2017
 
 
Farhang Shadman

 

ShadmanFarhang Shadman

 

 

Biosketch

Dr. Shadman is a Regents Professor of Chemical and Environmental Engineering (joint appointment as a Professor of Optical Sciences) at the University of Arizona and the Director of the NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing.  He was also the founder and Director of Sematech Center for Defect Control in Semiconductor Manufacturing from 1986 to 1996.


Dr. Shadman (PhD from the University of California-Berkeley, 1972) is the author of more than 140 journal articles, 3 book chapters, and 21 patents/invention disclosures.  Among his awards are Akira-Inoue Award (2002), Landmark Innovation Award (2000), SRC/Sematech/SIA Excellence in Research Award (1998 and 1992), and Invention Awards (SRC 1991 and 1992).  He is a Fellow of American Institute of Chemical Engineers.